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Articles
  • OpenAccess
  • Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory  [ICMTT 2016]
  • DOI: 10.4236/jcc.2016.43009   PP.61 - 67
  • Author(s)
  • F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler
  • ABSTRACT
  • A fully automatic setup for on-wafer contact probing will be presented. This setup consists of six automatable nano positioning axes used as tool holder and a sample holder. With this setup a fully automatic one-port SOL calibration for a Vector Network Analyzer is done. Furthermore a fully automated on-wafer contact probing is performed. Afterwards, the effects of a misalignment of the three tips of a GSG-probe are examined. Additionally the error on the calibration is calculated to determine its effect on the measurement. The results show, that a misalignment of the probe has a high impact on the measurement of the VNA. Hence a fully automated on-wafer probing presented in this paper is a good way to detect these misalignments and correct them if necessary.

  • KEYWORDS
  • Calibration, On-Wafer Measurements, Misalignment, Automation, High Frequency (HF) Probe, Ground-Signal-Ground (GSG) Probe
  • References
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