• OpenAccess
  • Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory  [ICMTT 2016]
  • DOI: 10.4236/jcc.2016.43009   PP.61 - 67
  • Author(s)
  • F. T. von Kleist-Retzow, T. Tiemerding, P. Elfert, O. C. Haenssler
  • A fully automatic setup for on-wafer contact probing will be presented. This setup consists of six automatable nano positioning axes used as tool holder and a sample holder. With this setup a fully automatic one-port SOL calibration for a Vector Network Analyzer is done. Furthermore a fully automated on-wafer contact probing is performed. Afterwards, the effects of a misalignment of the three tips of a GSG-probe are examined. Additionally the error on the calibration is calculated to determine its effect on the measurement. The results show, that a misalignment of the probe has a high impact on the measurement of the VNA. Hence a fully automated on-wafer probing presented in this paper is a good way to detect these misalignments and correct them if necessary.

  • Calibration, On-Wafer Measurements, Misalignment, Automation, High Frequency (HF) Probe, Ground-Signal-Ground (GSG) Probe
  • References
  • [1]
    Fellahi, A.E., Haddadi, K., Marzouk, J., Arscott, S., Boyaval, C., Lasri, T. and Dambrine, G. (2015) Nanorobotic RF Probe Station for Calibrated On-Wafer Measurement. Proceedings of the 45th European Microwave Conference, 163- 166.
    Michalas, L., Lucibello, A., Badino, G., Joseph, C., Brinciotti, E., Kienberger, F., Proietti, E. und Marcelli, R. (2015) Scanning Microwave Microscopy for Nanoscale Characterization of Semiconductors: De-embedding reflection contact mode measurements. Proceedings of the 45th European Microwave Conference, 159-162.
    Cascade Microtech Inc., On-Wafer Vector Network Analyzer Calibration and Measurements, Application Note.
    Cho, H. and Burk, D.E. (1991) A Three-Step Method for the De-embedding of High-Frequency S-Parameter Measurements. IEEE Transactions on electron devices, 1371-1375.
    Vandamme, E.P., Schreurs, D.M.M.-P. and Dinther, C.V. (2001) Improved Three-Step De-Embedding Method to Accurately Account for the Influence of Pad Parasitics in Silicon On-Wafer RF Test-Structures. IEEE Transactions on Electron Devices, 737-741.
    Safwat, A. und Hayden, L. (2002) Sensitivity Analysis of Calibration Standards for Fixed Probe Spacing On-Wafer Calibration Techniques. International Microwave Symposium (MTT 2002), 2257-2260.
    Davidson, A., Strid, E. and Jones, K. (1989) Achieving Greater On-Wafer S-Parameter Accuracy with the LRM Calibration Technique. 34th ARFTG Con-ference Digest.
    Diederichs, C., Mikczinski, M. and Tiemerding, T. (2014) A Flexible and Compact High Precision Micro-Factory for Low Volume Production and Lab-Automation. Proc. of 45th International Symposium on Robotics (ISR).
    Diederichs, C., Bartenwerfer, M., Mikczinski, M., Zimmermann, S., Tiemerding, T., Geldmann, C., Nguyen, H., Dahmen, C. and Fatikow, S. (2013) A Rapid Automation Framework for Applications on the Micro- and Nanoscale. Proc. of the 2013 Australasian Conference on Robotics and Automation (ACRA).
    Mishima, N., Tanikawa, T., Ashida, K. and Maekawa, H. (2002) Design of a Microfactory. ASME 2002 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, 103-110.
    Heikkil?, R., J?rvenp??, E. and Tuokko, R. (2010) Advances in the TUT Microfactory Concept Development. International Journal of Automation Technology, 117-126.
    Verettas, I., Clavel, R. and Codourey, A. (2006) PocketFactory: A Modular and Miniature Assembly Chain Including a Clean Environment. 5th Int. Workshop on Microfactories.
    Clèvy, C., Hubert, A. and Chaillet, N. (2008) Flexible Micro-Assembly System Equipped with an Automated Tool Changer. Journal of Micro-Nano Mechatronics, 59-72.
    Bradski, G. (2000) The OpenCV Library. Dr. Dobb’s Journal of Software Tools, 120; 122-125.
    Teppati, V. (2013) Modern rf and Microwave Measurement Techniques. The Cambridge RF and Microwave Engineering Series, 198-201.
    Bartenwerfer, M., Diederichs, C. and Fatikow, S. (2014) Automated Robotic Assembly for a Micro-Cartridge System inside the Scanning Electron Microscope. IEEE International Conference on Robotics and Automation (ICRA).
    Gong, Z., Chen, B.K., Liu, J. and Sun, Y. (2013) Automated Nano-probing under Scanning Electron Microscopy. IEEE International Conderence on Robotics and Automation (ICRA), 1425-1430.
    Rahman, B.M.F., Pengpeng, Y., Wang, T., Xia, T. and Wang, G. (2015) On-Wafer Calibration Technique for High Frequency Measurement with Simultaneous Voltage and Current Tuning. J Electron Test, 67-73.
    Williams, D.F. and Marks, R.B. (1991) Comparison of On-Wafer Calibrations. 38th ARFTG Conf. Dig., 68-81.
    Marks, R.B., Jargon, J.A. and Juroshek, J.R. (1996) Calibration Comparison for Vector Network Analyzers. 48th ARFTG Conference Digest, 38-45.

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